Edwards Seiko Seiki Turbomolecular MagLev Vacuum Pumps
Edwards Seiko Seiki Turbo Vacuum Pump Model: STP-A1303
Turbo Vacuum Pump Type: Bearing Lubricated
Variations of Edwards Seiko Seiki Turbo Vacuum Pump Model: STP-A1303C, STP-A1303WI
Turbopump Model Applications: semiconductor, coating, scientific research & development, LED, metallurgy, solar, flat panel display, plasma etch for metal, ion implantation source, film deposition,
diffusion, load lock chambers, surface analysis, mass spectrometry, high energy physics
Edwards Seiko Seiki Turbo Vacuum Pump Model: STP-H1301
Turbo Vacuum Pump Type: Magnetically Levitated
Variations of Edwards Seiko Seiki Turbo Vacuum Pump Model: STP-H1301C, STP-H1301L1B
Turbopump Model Applications: chemical specific and enhanced chemicals specific.
Edwards Seiko Seiki Turbo Vacuum Pump Model: STP-200
Turbo Vacuum Pump Type: Magnetically Levitated
Variations of Edwards Seiko Seiki Turbo Vacuum Pump Model: STP-200C
Turbopump Model Applications: plasma etch, ECR etch, film deposition, sputtering, ion implantation source, beam line pumping, MBE, diffusion, photo resist stripping, crystal / epitaxial growth, wafer
inspection, load lock chambers